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The properties study of transparent conductive oxides (TCO) of tin dioxide (ATO) doped by antimony obtained by spray pyrolysis

Department of Information measuring equipment and metrology, Penza State University, 440026, Penza, Russia

Special Issues: Advances in coating materials

Transparent conductive coatings based on thin films of metal oxides are widely used in various optoelectronic devices and appliances. The article is devoted to the study of the morphological, structural, electrical and optical properties of transparent conductive oxide. Tin dioxide thin films are obtained by spray pyrolysis technique on glass substrates. Analysis of the structural properties showed that SnO2 has a tetragonal crystal structure. Analysis of the morphological properties showed that the grain size of the films increases at a deposition temperature from 450 to 550 ℃. Dependencies of the transmittance coefficient of samples obtained on the solutions volume and transmittance coefficient of samples obtained on the doping levels have become the result of studying the optical properties of transparent conductive oxide. The transmittance is almost independent on the amount of substance sprayed onto the substrate. However, the transmittance is greatly influenced by the chemical composition of the films. The main electrical parameter affecting the TCO quality is conductivity or surface resistance. Surface resistance is measured by probe methods, the most accurate of which is the Van der Pauw method. Surface resistance consistently decreases with increasing solution volume, precursor concentration and impurity concentration.
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Keywords transparent conductive oxide; spray pyrolysis; tin dioxide; precursor; structural properties; conductivity; surface resistance; optical transparent

Citation: Timur Zinchenko, Ekaterina Pecherskaya, Dmitriy Artamonov. The properties study of transparent conductive oxides (TCO) of tin dioxide (ATO) doped by antimony obtained by spray pyrolysis. AIMS Materials Science, 2019, 6(2): 276-287. doi: 10.3934/matersci.2019.2.276

References

  • 1. Raksha SV, Kondrashin VI, Pecherskaya EA, et al. (2015) Functional materials for dye-sensitized solar cells. J Nano- Electron Phys 7: 04062.
  • 2. Kawazoe H, Yanagi H, Ueda K, et al. (2000) Transparent p-type conducting oxides: design and fabrication of p-n heterojunctions. MRS Bull 25: 28–36.
  • 3. Gordon RG (2000) Criteria for choosing transparent conductors. MRS Bull 25: 52–57.
  • 4. Lewis BG, Paine DC (2000) Applications and processing of transparent conducting oxides. MRS Bull 25: 22–27.
  • 5. Porch A, Morgan DV, Perks RM, et al. (2004) Electromagnetic absorption in transparent conducting films. J Appl Phys 95: 4734–4737.    
  • 6. Tiwari AN, Khrypunov G, Kurdzesau F, et al. (2004) CdTe solar cell in a novel configuration. Prog Photovoltaics 12: 33–38.    
  • 7. Hamberg I, Granqvist CG (1986) Evaporated Sn-doped In2O3 films: basic optical properties and applications to energy-efficient windows. J Appl Phys 60: R123–R160.    
  • 8. Batzill M, Diebold U (2005) The surface and materials science of tin oxide. Prog Surf Sci 79: 47–154.
  • 9. Zinchenko TO, Kondrashin VI, Pecherskaya EA, et al. (2017) Electrical properties of transparent conductive ATO coatings obtained by spray pyrolysis. IOP Conference Series: Materials Science and Engineering, 225: 012255.    
  • 10. Rembeza SI, Svistova TV, Rembeza ES, et al. (2004) Electric and optical properties of semiconductor films based on SnO2 and SiO2. Russ Electr Eng 75: 11–15.
  • 11. Biswas P, Wu CY (1998) Control of toxic metal emissions from combustors using sorbents: a review. J Air Waste Manage 48: 113–127.    
  • 12. Linak WP, Wendt JOL (1993) Toxic metal emissions from incineration: Mechanisms and control. Prog Energ Combust 19: 145–185.    
  • 13. Elangovan E, Ramamurthi K (2005) A study on low cost-hight conducting fluorine and antimony-doped tin oxide thin films. Appl Surf Sci 249: 183–196.    
  • 14. Patil GE, Kajale DD, Chavan DN, et al. (2011) Synthesis, characterization and gas sensing performance of SnO2 thin films prepared by spray pyrolysis. B Mater Sci 34: 1–9.    
  • 15. Vincent CA, Weston DGC (1972) Preparation and properties of semiconducting polycrystalline tin oxide. J Electrochem Soc 119: 518–521.    
  • 16. Babar AR, Shinde SS, Moholkar AV, et al. (2011) Structural and optoelectronic properties of sprayed Sb:SnO2 thin films: Effects of substrate temperature and nozzle-to-substrate distance. J Semicond 32: 102001.    
  • 17. Dominguez JE, Sun HP, Pan XQ (2002) Aliovalent dopant distribution in nanocrystalline tin dioxide thin films studied by X-ray energy dispersive spectroscopy. Microsc Microanal 8: 1168–1169.
  • 18. Korotcenkov G, Brinzari V, Schwank J, et al. (2001) Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application. Sensor Actuat B-Chem 77: 244–252.    
  • 19. Katerynchuk VM, Kovalyuk MZ (2010) Films of degenerate intrinsic oxides of InSe and In4Se3 semiconductor crystals. Semiconductors 44: 1176–1179.    
  • 20. Sidelev DV, Yurjev YN (2014) The reactive deposition of TiOx thin films. Adv Mater Res 1040: 748–752.    
  • 21. Ginley DS, Hosono H, Paine DC (2010) Handbook of transparent conductors, Springer.
  • 22. Solieman A, Aegerter MA (2006) Modeling of optical and electrical properties of In2O3:Sn coatings made by various techniques. Thin Solid Films 502: 205–211.    
  • 23. Meng LJ, Dos Santos MP (1997) Properties of indium tin oxides (ITO) films prepared by r.f. reactive magnetron sputtering at different pressures. Thin Solid Films 303: 151–155.
  • 24. Meng LJ, Gao J, Dos Santos MP, et al. (2008) The effect of the ion beam energy on the properties of indium tin oxide films prepared by ion beam assisted deposition. Thin Solid Films 516: 1365–1369.
  • 25. Zinchenko TO, Pecherskaya YA, Kondrashin VI, et al. (2017) Analysis of research methods of electro-physical properties of transparent conducting coatings received by spray pyrolysis. 18th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 320–323.
  • 26. Conwell E, Weisskopf VF (1950) Theory of impurity scattering in semiconductors. Phys Rev 77: 388.    
  • 27. Li QL, Zhang XH, Lin T, et al. (2018) Electrical transport properties of polycrystalline SnO2 thin films. J Alloy Compd 764: 295–299.    
  • 28. Gao KH, Lin T, Liu XD, et al. (2013) Low temperature electrical transport properties of F-doped SnO2 films. Solid State Commun 157: 49–53.    
  • 29. Dudnik EV, Lakiza SN, Tishchenko YS, et al. (2014) Phase diagrams of refractory oxide systems and microstructural design of materials. Powder Metall Met C 53: 303–311.    

 

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