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Study of oxide/metal/oxide thin films for transparent electronics and solar cells applications by spectroscopic ellipsometry

1 Photonics Laboratory, Angers University, 2, Bd. Lavoisier, 49045, Angers, France
2 Faculty of Physics, “Al.I.Cuza” University, Iasi, Romania
3 François Rabelais University, Tours, France

Topical Section: Optical/Electronic/Magnetic properties

A comprehensive study of a class of Oxide/Metal/Oxide (Oxide = ITO, AZO, TiO2 and Bi2O3, Metal = Au) thin films was done by correlating the spectrophotometric studies with the ellispometric models. Films were deposited by successive sputtering from metallic targets In:Sn, Zn:Al, Ti and Bi in reactive atmosphere (for the oxide films) and respective inert atmosphere (for the metallic Au interlayer films) on glass substrates. The measurements of optical constants n—the refractive index and k—the extinction coefficient, at different incident photon energies for single oxide films and also for the three layers films oxide/metal/oxide samples were made using the spectroscopic ellipsometry (SE) technique. The ellipsometry modelling process was coupled with the recorded transmission spectra data of a double beam spectrophotometer and the best fitting parameters were obtained not only by fitting the n and k experimental data with the dispersion fitting curves as usual is practiced in the most reported data in literature, but also by comparing the calculated the transmission coefficient from ellipsometry with the experimental values obtained from direct spectrophotometry measurements. In this way the best dispersion model was deduced for each sample. Very good correlations were obtained for the other different thin films characteristics such as the films thickness, optical band gap and electrical resistivity obtained by other measurements and calculation techniques. The ellipsometric modelling, can hence give the possibility in the future to predict, by ellipsometric simulations, the proper device architecture in function of the preferred optical and electrical properties.
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1. Granqvist CG (2007) Transparent Conductors as Solar Energy Materials: A Panoramic Review. Sol Energ Mat Sol C 91: 1529–1598.    

2. Granqvist CG (2003) Solar Energy Materials. Adv Mater 15: 1789–1803.    

3. Girtan M (2005) Investigations on the Optical Constants of Indium Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis. Mater Sci Eng B 118: 175–178.    

4. Girtan M, Folcher G (2003) Structural and optical properties of indium oxide thin films prepared by an ultrasonic spray CVD process. Surf Coat Tech 172: 242–250.    

5. Girtan M, Rusu GI, Rusu GG (2000) The influence of preparation conditions on the electrical and optical properties of oxidized indium thin films. Mater Sci Eng B 76: 156–160.    

6. Rusu M, Rusu GG, Girtan M, et al. (2008) Structural and optical properties of ZnO thin films deposited onto ITO/glass substrates. J Non-Cryst Solids 354: 4461–4464.    

7. Girtan M, Bouteville A, Rusu GG, et al. (2006) Preparation and properties of SnO2 :F thin films. J Optoelectron Adv M 8: 27–30.

8. Girtan M, Vlad A, Mallet R, et al. (2013) On the properties of aluminium doped zinc oxide thin films deposited on plastic substrates from ceramic targets. Appl Surf Sci 274: 306–313.    

9. Girtan M, Kompitsas M, Mallet R, et al. (2010) On physical properties of undoped and Al and In doped zinc oxide films deposited on PET substrates by reactive pulsed laser deposition. Eur Phys J Appl Phys 51.

10. Ghomrani FZ, Iftimie S, Gabouze N, et al. (2011) Influence of Al doping agents nature on the physical properties of Al:ZnO films deposited by spin-coating technique. Optoelectron Adv Mat 5: 247–251.

11. Socol M, Preda N, Rasoga O, et al. (2016) Flexible Heterostructures Based on Metal Phthalocyanines Thin Films Obtained by MAPLE. Appl Surf Sci 374: 403–410.    

12. Girtan M, Mallet R, Caillou D, et al. (2009) Thermal Stability of Poly(3,4-ethylenedioxythiophene)-polystyrenesulfonic Acid Films Electric Properties. Superlattice Microst 46: 44–51.    

13. Koralli P, Varol SF, Kompitsas M, et al. (2016) Brightness of Blue/Violet Luminescent Nano-Crystalline AZO and IZO Thin Films with Effect of Layer Number: For High Optical Performance. Chinese Phys Lett 33.

14. Iftimie S, Mallet R, Merigeon J, et al. (2015) On the structural, morphological and optical properties of ITO, ZnO, ZnO:Al and NiO thin films obtained by thermal oxidation. Dig J Nanomater Bios 10: 221–229.

15. Gong L, Lu JG, Ye ZZ (2011) Transparent conductive Ga-doped ZnO/Cu multilayers prepared on polymer substrates at room temperature. Sol Energ Mat Sol C 95: 1826–1830.    

16. Girtan M, Mallet R (2014) On the electrical properties of transparent electrodes. Proceedings of the Romanian Academy Series A-Mathematics Physics Technical Sciences Information Science, 15: 146–150.

17. Girtan M (2012) Comparison of ITO/metal/ITO and ZnO/metal/ZnO Characteristics as Transparent Electrodes for Third Generation Solar Cells. Sol Energ Mater Sol C 100: 153–161.    

18. Kubis P, Lucera L, Machui F, et al. (2014) High Precision Processing of Flexible P3HT/PCBM Modules with Geometric Fill Factor over 95%. Org Electron 15: 2256–2263.    

19. Berny S, Blouin N, Distler A, et al. (2016) Solar Trees: First Large-Scale Demonstration of Fully Solution Coated, Semitransparent, Flexible Organic Photovoltaic Modules. Adv Sci 3.

20. Wanga K, Chenga B, Wub B, et al. (2014) Study of annealing effects upon the optical and electrical properties of SnO2:F/SiCxOy low emissivity coatings by spectroscopic ellipsometry. Thin Solid Films 571: 720–726.    

21. Yuan G, Wang K, Li M, et al. (2016) In situ optical characterizations of the annealing effects upon SnO2:F films by spectroscopic ellipsometry. Mater Res Express 3: 105048.    

22. Girtan M, Socol M, Pattier B, et al. (2010) On the structural, morphological, optical and electrical properties of sol-gel deposited ZnO In films. Thin Solid Films 519: 573–577.    

23. Rusu GG, Girtan M, Rusu M (2007) Preparation and characterization of ZnO thin films prepared by thermal oxidation of evaporated Zn thin films. Superlattice Microst 42: 116–122.    

24. Fortunato E, Nunes P, Marques A, et al. (2002) Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering. Surf Coat Tech 151: 247–251.

25. Craciun V, Amirhaghi S, Craciun D, et al. (1995) Effects of laser wavelength and fluence on the growth of ZnO thin-films by pulsed-laser deposition. Appl Surf Sci 86: 99–106.    

26. Kim H, Horwitz JS, Kim WH, et al. (2002) Doped ZnO thin films as anode materials for organic light-emitting diodes. Thin Solid Films 420: 539–543.

27. Liu Y, Zhao L, Lian J (2006) Al-doped ZnO films by pulsed laser deposition at room temperature. Vacuum 81: 18–21.    

28. Manole AV, Dobromir M, Girtan M, et al. (2013) Optical Properties of Nb-doped TiO2 Thin Films Prepared by Sol-gel Method. Ceram Int 39: 4771–4776.    

29. Saidi W, Hfaidh N, Rashed M, et al. (2016) Effect of B2O3 Addition on Optical and Structural Properties of TiO2 as a New Blocking Layer for Multiple Dye Sensitive Solar Cell Application (DSSC). RSC Adv 6: 68819–68826.    

30. Mardare D, Iacomi F, Cornei N, et al. (2010) Undoped and Cr-doped TiO2 thin films obtained by spray pyrolysis. Thin Solid Films 518: 4586–4589.    

31. Vaiciulis I, Girtan M, Stanculescu A, et al. (2012) On titanium oxide spray deposited thin films for solar cells applications. Proceedings of the Romanian Academy Series A-Mathematics Physics Technical Sciences Information Science, 13: 335–342.

32. Mardare D, Yildiz A, Girtan M, et al. (2012) Surface wettability of titania thin films with increasing Nb content. J Appl Phys 112.

33. Pattier B, Henderson M, Kassiba A, et al. (2009) EPR and SAXS studies of a TiO2-based gel. 3rd ICTON Mediterranean Winter Conference, Angers, France.

34. Green MA, HO-Baillie A, Snaith HJ (2014) The emergence of perovskite solar cells. Nat Photonics 8: 506–514.    

35. Hagfeldt A, Cappel UB, Boschloo G, et al. (2012) Mesoporous Dye-Sensitized Solar Cells, Elsevier, 481–496.

36. Nazeeruddin MK, Grätzel M (2004) Conversion and Storage of Solar Energy using Dye-sensitized Nanocrystalline TiO2 Cells, Pergamon, Comprehensive Coordination Chemistry II, 9: 719–758

37. Millington KR (2009) Photoelectrochemical cells|Dye-Sensitized Cells, Encyclopedia of Electrochemical Power Sources, 10–21.

38. Burschka J, et al. (2013) Sequential deposition as a route to high-performance perovskite-sensitized solar cells. Nature 499: 316–319.    

39. Lee MM, Teuscher J, Miyasaka T, et al. (2012) Efficient hybrid solar cells based on meso-superstructured organometal halide perovskites. Science 338: 643–647.    

40. Lewis NS (2004) Photosynthesis, Artificial, Encyclopedia of Energy, 17–24.

41. Pandit A, Frese RN (2012) Artificial Leaves: Towards Bio-Inspired Solar Energy Converters, In: Sayigh A, Comprehensive Renewable Energy, Elsevier, 657–677.

42. Rusu GI, Leontie L, Rusu GG, et al. (1999) On the electronic transport properties of oxidized bismuth thin films. Analele Stiintifice Ale Universitatii Al. I. Cuza Din Iasi Fizica Stării Condensate 104–112.

43. Fruth V, Popa M, Berger D, et al. (2005) Deposition and characterisation of bismuth oxide thin films. J Eur Ceram Soc 25: 2171–2174.    

44. Tompkins HG, McGahan AW (1999) Spectroscopic Ellipsometry and Reflectometry: A user's guide, New York: Wiley.

45. Bhattacharyya D, Sahoo NK, Thakur S, et al. (2000) Spectroscopic ellipsometry of TiO2 layers prepared by ion-assisted electron-beam evaporation. Thin Solid Films 360: 96–102.    

46. Bernoux Fran F, Piel JP, Castellon B, et al. (2003) Ellipsométrie. Théorie. Techniques de l'ingénieur. Mesures et contrôle RD3: R6490.1–R6490.11.

47. Abeles F (1967) Advanced Optical Techniques, North-Holland, Amsterdam, 145.

48. Heavens OS (1955) Optical Properties of Thin Solid Films, London: Butter worth.

49. Hartnagel HL, Dawar AL, Jain AK, et al. (1995) Semiconducting Transparent Thin Films, Bristol: Institute of Physics.

50. Fujiwara H (2007) Spectroscopic Ellipsometry: Principles and Applications, New York: Wiley.

51. Horiba Delta Psi2 Software.

52. D'Elia S, Scaramuzza N, Ciuchi F. et al. (2009) Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude–Lorentz model. Appl Surf Sci 255: 7203–7211.    

53. Bellingham JR, Phillips WA, Adkins CJ (1991) Amorphous Indium Oxide. Thin Solid Films 202: 23–31.

54. Torres-Huerta M, Domínguez-Crespo MA, Brachetti-Sibaja SB, et al. (2011) Effect of the substrate on the properties of ZnO–MgO thin films grown by atmospheric pressure metal-organic chemical vapor deposition. Thin Solid Films 519: 6044–6052.    

55. Forouhi AR, Bloomer I (1986) Optical dispersion relations for amorphous semiconductors and amorphous dielectrics. Phys Rev B 34: 7018.    

56. Kim JK, Gessmann T, Schubert EF, et al. (2006) GaInN light-emitting diode with conductive omnidirectional reflector having a low refractive-index indium-tin oxide layer. Appl Phys Lett 88: 013501.    

57. Wang YC, Lin BY, Liu PT, et al. (2013) Photovoltaic electrical properties of aqueous grown ZnO antireflective nanostructure on Cu(In, Ga)Se2 thin film solar cells. Opt Express 22: A13–A20.

58. Mardare D, Hones P (1999) Optical dispersion analysis of TiO2 thin films based onvariable-angle spectroscopic ellipsometry measurements. Mater Sci Eng B 68: 42–47.

59. Condurache-Bota S, Tigau N, Rambu AP, et al. (2011) Optical and electrical properties of thermally oxidized bismuth thin films. Appl Surf Sci 257: 10545–10550.

60. Eiamchai P, Chindaudom P, Pokaipisit A, et al. (2009) A spectroscopic ellipsometry study of TiO2 thin films prepared by ion-assisted electron-beam evaporation. Curr Appl Phys 9: 707–712.    

61. Leontie L, Caraman M, Visinoiu A, et al. (2005) On the optical properties of bismuth oxide thin films prepared by pulsed laser deposition. Thin Solid Films 473: 230–235.    

62. Sun HT, Wang XP, Kou ZQ, et al. (2015) Optimization of TiO2/Cu/TiO2 multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature. Chinese Phys B 24: 047701.    

63. Bube RH (1974) Electronic Properties of Crystalline Solids, New York: Academic Press.

Copyright Info: © 2017, Mihaela Girtan, et al., licensee AIMS Press. This is an open access article distributed under the terms of the Creative Commons Attribution Licese (http://creativecommons.org/licenses/by/4.0)

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