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Airborne PM2.5 characteristics in semiconductor manufacturing facilities

Samsung Health Research Institute, Samsung Electronics Co. Ltd., Hawseong-City, Gyeonggi-Do, 18448, Korea

This study aimed to elucidate the concentrations and physicochemical properties of airborne PM2.5 during the normal operation of process equipment and scrubber in semiconductor manufacturing facilities, including the clean room (CR), plenum, clean sub fab (CSF), and facility sub fab (FSF). Number and mass concentrations of PM2.5 in the main facilities, such as the CR, plenum and CSF ranged ND-4.766 #/cm3 and ND-1.072 µg/m3, respectively, and for FSF, ranged 9.261–134.088 #/cm3 and 0.574–25.941 µg/m3. The concentration levels of PM2.5 in the FSF (excluding CR, plenum, and CSF) were partially affected by the PM levels in outdoor air. The particles of 0.3–1.0 µm corresponding to PM1 for number and mass concentrations accounted for 98.44–99.67% and 75.00–96.43%, respectively, of PM2.5, which contains 0.3–2.5 µm particles. In all particles, O and Si were detected in common, and also Al, F, Fe, Mg, K, Ca, and Ti elements were intermittently detected according to the sample. The elemental compositions of airborne particles in the FSF were almost coincident with those of the particles sampled in outdoor air. No particles were evident on the filter media in the CR and CSF. The morphology of the observed particles was spherical and nearly spherical based on the primary particle, and the size ranged approximately 1.5–6.0 µm, which means that particles were likely to be formed by the agglomeration and/or aggregation of primary particles of less than 100 nm. These results can provide useful information for the development of alternative strategies to improve the work environment and worker’s health in the semiconductor industry.
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Keywords particulate matter; concentration; elemental component; size; morphology; semiconductor fabrication environment

Citation: Kwang-Min Choi. Airborne PM2.5 characteristics in semiconductor manufacturing facilities. AIMS Environmental Science, 2018, 5(3): 216-228. doi: 10.3934/environsci.2018.3.216


  • 1. Miller FJ, Gardner DE, Graham JA, et al. (1979) Size considerations for establishing a standard for inhalable particles. J Air Poll Control Assoc 29: 610–615.    
  • 2. Schwarze PE, Øvrevik J, Låg M, et al. (2006) Particulate matter properties and health effects: consistency of epidemiological and toxicological studies. Human Exp Toxicol 25: 559–579.    
  • 3. Valavanidis A, Fiotakis K, Vlachogianni T (2008) Airborne particulate matter and human health: toxicological assessment and importance size and composition of particles for oxidative damage and carcinogenic mechanisms. J Environ Sci Health Part C 26: 339–362.    
  • 4. International Agency for Research on Cancer (IARC) (2013) Outdoor air pollution. IARC Monographs on the Evaluation of Carcinogenic Risks to Humans. Volume 109.
  • 5. Donaldson K, MacNee W (2001) Potential mechanisms of adverse pulmonary and cardiovascular effects of particulate air pollution (PM10). Int J Hyg Environ Health 203: 411–415.    
  • 6. MacNee W, Donaldson K (2003) Mechanism of lung injury caused by PM10 and ultrafine particles with special reference to COPD. Eur Respir J 21: 47s–51s.    
  • 7. Dominici F, Peng RD, Bell ML, et al. (2006) Fine particulate air pollution and hospital admission for cardiovascular and respiratory diseases. JAMA 295: 1127–1134.    
  • 8. Schlesinger RB (2007) The health impact of common inorganic components of fine particulate matter (PM2.5) in ambient air: a critical review. Inhal Toxicol 19: 811–832.    
  • 9. Leiva MA, Santibanez DA, Ibarra S, et al. (2013) A five-year study of particulate matter (PM2.5) and cerebrovascular diseases. Environ Pollut 181: 1–6.    
  • 10. Atkinson RW, Kang S, Anderson HR, et al. (2014) Epidemiological time series studies of PM2.5 and daily mortality and hospital admissions: a systematic review and meta-analysis. Thorax Thoraxjnl-2013.
  • 11. Xing YF, Xu YH, Shi MH, et al. (2016) The impact of PM2.5 on the human respiratory system. J Thorac Dis 8: E69–E74.
  • 12. Oberdörster G, Oberdörster E, Oberdörster J (2005) Nanotoxicology: an emerging discipline evolving from studies of ultrafine particles. Environ Health Perspect 113: 823–839.    
  • 13. Franklin M, Koutrakis P, Schwartz J (2008) The role of particle composition on the association between PM2.5 and mortality. Epidemiology 19: 680–689.    
  • 14. Thornton JA, McGuire GE (1988) Semiconductor Materials and Process Technology Handbook. New Jersey: Noyes Publications, 329.
  • 15. May GS, Spans CJ (2006) Fundamental of Semiconductor Manufacturing and Process Control. John Wiley & Sons, Inc., New Jersey.
  • 16. Ino K, Natori I, Ichikawa A, et al. (1996) Plasma enhanced in situ chamber cleaning evaluated by extracted-plasma-parameter analysis. IEEE Trans Semicond Manuf 9: 230–240.    
  • 17. Ji B, Elder DL, Yang JH, et al. (2009) Power dependence of NF3 plasma stability for in situ chamber cleaning. J Appl Phys 95: 4446–4451.
  • 18. International Organization for Standard (ISO). ISO 14644-1, Cleanrooms and associate controlled environments-Part 1: classification of air cleanliness. 1999.
  • 19. Whyte W (2001) Cleanroom Technology: Fundamentals of Design, Testing and Operation. John Wiley & Sons, Inc., Chichester, UK. Chapter 1: 1–8.
  • 20. USEPA (2012) Particulate Matter (PM) Standard. United States Environmental Protection Agency.
  • 21. Ministry of Environment (2011) Clean Air Conservation Act.
  • 22. Giugliano M, Lonati G, Butelli P, et al. (2005) Fine particulate (PM2.5–PM1) at urban sites different traffic exposure. Atmos Environ 39: 2421–2431.    
  • 23. Lee SC, Cheng Y, Ho FK, et al. (2006) PM1.0 and PM2.5 characteristics in the roadside environment of Hong Kong. Aerosol Sci Technol 40: 157–165.    
  • 24. Fujii Y, Mahmud M, Tohno S, et al. (2016) A case study of PM2.5 characterization in Bangi, Selangor, Malaysia during the Southwest monsoon season. Aerosol Air Qual Res 16: 2685–2691.    
  • 25. Lang J, Zhang Y, Zhou Y, et al. (2017) Trend of PM2.5 and chemical composition in Beijing, 2000-2015. Aerosol Air Qual Res 17: 412–425.    
  • 26. Choi KM, Kim TH, Kim KS, et al. (2013) Hazard identification of powder generated from a chemical vapor deposition process in the semiconductor manufacturing industry. J Occup Environ Hyg 10: D1–D5.    
  • 27. Choi KM, An HC, Kim KS (2015) Identifying the hazard characteristics of powder by-products generated semiconductor fabrication processes. J Occup Environ Hyg 12: 114–122.    
  • 28. Talifu D, Wuji A, Tursun Y, et al. (2015) Micro-morphology characteristics and size distribution of PM2.5 in the Kuitun-Dushanzi region of Xinjiang, China. Aerosol Air Qual Res 15: 2258–2269.
  • 29. Hueglin C, Gehrig R, Baltensperger U, et al. (2005) Chemical characterization of PM2.5, PM10 and coarse particles at urban, near-city and rural sites in Switzerland. Atmos Environ 39: 637–651.    
  • 30. Seneviratne S, Handagiripathira L, Sanjeevani S, et al. (2017) Identification of source of fine particulate matter in Kandy, Sri Lanka. Aerosol Air Qual Res 17: 476–484.    
  • 31. Li TC, Yuan CS, Lo KC, et al. (2015) Seasonal variation and chemical characteristics of atmospheric particles at three islands in the Taiwan Strait. Aerosol Air Qual Res 15: 2277–2290.


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