Possibilities and Challenges of Scanning Hard X-ray Spectro-microscopy Techniques in Material Sciences

Andrea Somogyi; Cristian Mocuta; Andrea Somogyi; Cristian Mocuta

doi:10.3934/matersci.2015.2.122

AIMS Materials Science

2015, Volume 2, Issue 2: 122-162. doi: 10.3934/matersci.2015.2.122

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Possibilities and Challenges of Scanning Hard X-ray Spectro-microscopy Techniques in Material Sciences

Andrea Somogyi ^,,
Cristian Mocuta

Synchrotron Soleil, BP 48, Saint-Aubin, Gif sur Yvette, 91192, France

Received: 27 March 2015 Accepted: 09 June 2015 Published: 16 June 2015

Scanning hard X-ray spectro-microscopic imaging opens unprecedented possibilities in the study of inhomogeneous samples at different length-scales. It gives insight into the spatial variation of the major and minor components, impurities and dopants of the sample, and their chemical and electronic states at micro- and nano-meter scales. Measuring, modelling and understanding novel properties of laterally confined structures are now attainable. The large penetration depth of hard X-rays (several keV to several 10 keV beam energy) makes the study of layered and buried structures possible also in in situ and in operando conditions. The combination of different X-ray analytical techniques complementary to scanning spectro-microscopy, such as X-ray diffraction, X-ray excited optical luminescence, secondary ion mass spectrometry (SIMS) and nano-SIMS, provides access to optical characteristics and strain and stress distributions. Complex sample environments (temperature, pressure, controlled atmosphere/vacuum, chemical environment) are also possible and were demonstrated, and allow as well the combination with other analysis techniques (Raman spectroscopy, infrared imaging, mechanical tensile devices, etc.) on precisely the very same area of the sample. The use of the coherence properties of X-rays from synchrotron sources is triggering emerging experimental imaging approaches with nanometer lateral resolution. New fast analytical possibilities pave the way towards statistically significant studies at multi- length-scales and three dimensional tomographic investigations. This paper gives an overview of these techniques and their recent achievements in the field of material sciences.
- scanning hard X-ray microscopy,
- spectro-microscopy,
- elemental distribution,
- chemical state,
- impurities,
- dopants,
- multi-technique imaging,
- local strain,
- lattice parameter,
- lensless microscopy
Citation: Andrea Somogyi, Cristian Mocuta. Possibilities and Challenges of Scanning Hard X-ray Spectro-microscopy Techniques in Material Sciences[J]. AIMS Materials Science, 2015, 2(2): 122-162. doi: 10.3934/matersci.2015.2.122

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Abstract

Scanning hard X-ray spectro-microscopic imaging opens unprecedented possibilities in the study of inhomogeneous samples at different length-scales. It gives insight into the spatial variation of the major and minor components, impurities and dopants of the sample, and their chemical and electronic states at micro- and nano-meter scales. Measuring, modelling and understanding novel properties of laterally confined structures are now attainable. The large penetration depth of hard X-rays (several keV to several 10 keV beam energy) makes the study of layered and buried structures possible also in in situ and in operando conditions. The combination of different X-ray analytical techniques complementary to scanning spectro-microscopy, such as X-ray diffraction, X-ray excited optical luminescence, secondary ion mass spectrometry (SIMS) and nano-SIMS, provides access to optical characteristics and strain and stress distributions. Complex sample environments (temperature, pressure, controlled atmosphere/vacuum, chemical environment) are also possible and were demonstrated, and allow as well the combination with other analysis techniques (Raman spectroscopy, infrared imaging, mechanical tensile devices, etc.) on precisely the very same area of the sample. The use of the coherence properties of X-rays from synchrotron sources is triggering emerging experimental imaging approaches with nanometer lateral resolution. New fast analytical possibilities pave the way towards statistically significant studies at multi- length-scales and three dimensional tomographic investigations. This paper gives an overview of these techniques and their recent achievements in the field of material sciences.

References

[1]	Bordiga S, Groppo E, Agostini G, et al. (2013) Reactivity of surface species in heterogeneous catalysts probed by in situ x-ray absorption techniques. Chem Rev 113: 1736-1850. doi: 10.1021/cr2000898
[2]	Hrauda N, Zhang J, Wintersberger E, et al. (2011) X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor. Nano Lett 11: 2875-2880. doi: 10.1021/nl2013289
[3]	Buurmans ILC, Weckhuysen BM (2012). Space and time as monitored by spectroscopy, Nature Chemistry 4:873-886.
[4]	Hitchcock AP, Johansson GA, Mitchell GH, et al. (2008). 3-d chemical imaging using angle-scan nanotomography in a soft X-ray scanning transmission X-ray microscope. Appl Phys A 92:447-452. doi: 10.1007/s00339-008-4588-x
[5]	Hitchcock AP (2012) Soft X-Ray Imaging and Spectromicroscopy, in Handbook of Nanoscopy, Volume 1&2 (eds G. Van Tendeloo, D. Van Dyck and S. J. Pennycook), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany.
[6]	Ade H, Stoll H (2009) Near-edge X-ray absorption fine-structure microscopy of organic and magnetic materials. Nature Materials 8: 281-290. doi: 10.1038/nmat2399
[7]	Kaulich B, Thibault P, Gianoncelli A, et al. (2011) Transmission and emission x-ray microscopy: operation modes, contrast mechanisms and applications. J Phys Cond Matter 23: 083002. doi: 10.1088/0953-8984/23/8/083002
[8]	Beale AM, Jacques SDM, & Weckhuysen BM (2010). In-situ characterization of heterogeneous catalysts themed issue Chemical imaging of catalytic solids with synchrotron radiation. Chem Soc Rev 39: 4656-4672. doi: 10.1039/c0cs00089b
[9]	Harris WM, Nelson GJ, Kiss A, at al. (2012) Nondestructive volumetric 3-D chemical mapping of nickel-sulfur compounds at the nanoscale. Nanoscale 4: 1557-1560. doi: 10.1039/c2nr11690a
[10]	Wang J, Chen-wiegart YK, Wang J, (2014) In operando tracking phase transformation evolution of lithium iron phosphate with hard X-ray microscopy. Nature Com 5: 1.
[11]	Fenter P, Park C, Zhang Z, et al. (2006) Observation of Sub-nm-High Surface Topography with X-ray Reflection Phase-Contrast Microscopy. Nat Phys 2: 700-704. doi: 10.1038/nphys419
[12]	Fenter P, Park C, Kohli V, et al. (2008) Image contrast in X-ray reflection interface microscopy: comparison of data with model calculations and simulations. J Synch Rad 15: 558-571. doi: 10.1107/S0909049508023935
[13]	Fister TT, Goldman JL, Long BR, et al. (2013) X-ray diffraction microscopy of lithiated silicon microstructures. Appl Phys Lett 102: 131903. doi: 10.1063/1.4798554
[14]	Hilhorst J, Marschall F, Tran Thi TN, et al. (2014) Full-field X-ray diffraction microscopy using polymeric compound refractive lenses. J Appl Cryst 47: 1882-1888. doi: 10.1107/S1600576714021256
[15]	Mocuta C, Barbier A, Stanescu S, et al. (2013) X-ray diffraction imaging of metal-oxide epitaxial tunnel junctions made by optical lithography: use of focused and unfocused X-ray beams. J Synch Rad 20: 355-365. doi: 10.1107/S090904951204856X
[16]	Luebbert D, Baumbach T, Hartwig J, et al. (2000) μm-resolved high resolution X-ray diffraction imaging for semiconductor quality control. Nucl Meth Phys Res B160:521-527. doi: 10.1016/S0168-583X(99)00619-9
[17]	Ice GE, Budai JD, Pang JWL (2011) The Race to X-ray Microbeam and Nanobeam Science. Science 334: 1234-1239. doi: 10.1126/science.1202366
[18]	Stangl J, Mocuta C, Chamard V, et al. (2014) Nanobeam X-ray Scattering—Probing matter at the Nanoscale. Wiley VCH WileyBook.
[19]	Johannes A, Noack SJrWP, Kumar S, et al. (2014) Enhanced sputtering and incorporation of Mn in implanted GaAs and ZnO nanowires. J Phys D Appl Phys 47: 394003. doi: 10.1088/0022-3727/47/39/394003
[20]	Segura-Ruiz J, Martinez-Criado G, Chu MH, et al. (2013) Synchrotron nanoimaging of single In-rich InGaN nanowires. J Appl Phys 113: 136511. doi: 10.1063/1.4795544
[21]	Stangl J, Mocuta C, Diaz A, et al. (2009) X-Ray Diffraction as a Local Probe Tool. Chem Phys Chem 10: 2923-2930.
[22]	Maser J, Lai B, Buonassisi T, et al. (2014) A Next-Generation Hard X-Ray Nanoprobe Beamline for In Situ Studies of Energy Materials and Devices. Metall Mater Trans A 45: 85-97. doi: 10.1007/s11661-013-1901-x
[23]	Martinez-Criado G, Segura-Ruiz J, Alén B, et al. (2014) Exploring single semiconductor nanowires with a multimodal hard X-ray nanoprobe. Adv Mater 1-7.
[24]	Holt M, Harder R, Winarski R, et al. (2013) Nanoscale Hard X-ray Microscopy Methods for Materials Studies. Annu Rev Mater Res 43: 3.1-3.29.
[25]	Weker JN, Toney MF (2015) Emerging In Situ and Operando Nanoscale X-Ray Imaging Techniques for Energy Storage Materials. Adv Func Mat 25: 1622-1637. doi: 10.1002/adfm.201403409
[26]	Sirenko AA, Reynolds CL, Peticolas LJ, et al. (2003) Micro-X-ray fluorescence and micro-photoluminescence in InGaAsP and InGaAs layers obtained by selective area growth. J Crystal Growth 253: 38-45. doi: 10.1016/S0022-0248(03)00996-5
[27]	Mino L, Agostino A, Codato S, et al. (2010) Study of epitaxial selective area growth In1-xGaxAs films by synchrotron µ-XRF mapping. J Anal At Spectrom 25: 831-836. doi: 10.1039/c000435a
[28]	Buonassisi T, Istratov AA, Marcus MA, et al. (2005) Engineering metal-impurity nanodefects for low-cost solar cells. Nature Materials 4: 676-679. doi: 10.1038/nmat1457
[29]	Kwapil W, Gundel P, Schubert MC, et al. (2009) Observation of metal precipitates at prebreakdown sites in multicrystalline silicon solar cells. Appl Phys Lett 95:23-25.
[30]	Bertoni MI, Fenning DP, Rinio M, et al. (2011) Nanoprobe X-ray fluorescence characterization of defects in large-area solar cells. Energy Environ Sci 4: 4252-4257. doi: 10.1039/c1ee02083h
[31]	Hu Q, Aboustait M, Ley MT, et al. (2014) Combined three-dimensional structure and chemistry imaging with nanoscale resolution. Acta Materialia 77: 173-182. doi: 10.1016/j.actamat.2014.05.050
[32]	Mino L, Agostini G, Borfecchia E, et al. (2013) Low-dimensional systems investigated by x-ray absorption spectroscopy: a selection of 2D, 1D and 0D cases. J Phys D: Appl Phys 46: 423001. doi: 10.1088/0022-3727/46/42/423001
[33]	Martinez-Criado G, Segura-Ruiz J, Chu M, et al. (2014a) Crossed Ga2O3/SnO2 Multiwire Architecture: A Local Structure Study with Nanometer Resolution. Nano Letters 14: 5479-5487.
[34]	Larcheri S, Rocca F, Pailharey D, et al. (2009) A new tool for nanoscale X-ray absorption spectroscopy and element-specific SNOM microscopy. Micron 40: 61-65. doi: 10.1016/j.micron.2008.01.020
[35]	Shirato N, Cummings M, Kersell H, et al. (2014) Elemental Fingerprinting of Materials with Sensitivity at the Atomic Limit. Nano Letters 14: 6499-6504. doi: 10.1021/nl5030613
[36]	Mocuta C, Stangl J, Mundboth K, et al. (2008) Beyond the ensemble average: X-ray microdiffraction analysis of single SiGe islands. Phys Rev B77: 245425.
[37]	Bleuet P, Cloetens P, Gergaud P, et al. (2009) A hard x-ray nanoprobe for scanning and projection nanotomography. Rev Sci Inst 80: 056101. doi: 10.1063/1.3117489
[38]	Bunk O, Bech M, Jensen TH, et al. (2009) Multimodal x-ray scatter imaging. New J Phys 11: 123016. doi: 10.1088/1367-2630/11/12/123016
[39]	Meirer F, Cabana J, Liu Y, et al. (2011) Three-dimensional imaging of chemical phase transformations at the nanoscale with full-field transmission X-ray microscopy. J Synch Rad 18: 773-781. doi: 10.1107/S0909049511019364
[40]	Villanova J, Segura-Ruiz J, Lafford T, et al. (2012) Synchrotron microanalysis techniques applied to potential photovoltaic materials. J Sync Rad 19: 521-524. doi: 10.1107/S0909049512021383
[41]	Gómez-Gómez M, Garro N, Segura-Ruiz J, et al. (2014) Spontaneous core-shell elemental distribution in In-rich InxGa1-xN nanowires grown by molecular beam epitaxy. Nanotechnology 25: 075705. doi: 10.1088/0957-4484/25/7/075705
[42]	Tsuji K, Injuk J, Van Grieken R (2004) X-ray spectrometry: recent technological advances. John Wiley & Sons, Ltd.
[43]	Hippert F, Geissler E, Hodeau JL, et al. (eds) (2006) Neutron and X-ray spectroscopy. Springer.
[44]	Van Grieken R, Markowicz A (2001) Handbook of X-Ray Spectrometry. CRC Press.
[45]	Somogyi A, Medjoubi K, Baranton G, et al. (2015). Optical design and multi-length-scale scanning spectro-microscopy possibilities at the Nanoscopium beamline of Synchrotron Soleil. J Synch Rad. In press
[46]	Schroer CG (2001) Reconstructing x-ray fluorescence microtomograms. Appl Phys Lett 79: 1912. doi: 10.1063/1.1402643
[47]	Golosio B, Somogyi A, Simionovici A, et al. (2004) Nondestructive three-dimensional elemental microanalysis by combined helical x-ray microtomographies. Appl Phys Lett 84: 2199. doi: 10.1063/1.1686892
[48]	Bleuet P, Gergaud P, Lemelle L, et al. (2010) 3D chemical imaging based on a third-generation synchrotron source. TrAC-Trends in Anal Chem 29: 518-527. doi: 10.1016/j.trac.2010.02.011
[49]	De Jonge MD, Vogt S,(2010) Hard X-ray fluorescence tomography-an emerging tool for structural visualization. Curr Opin Struct Biol 20: 606.
[50]	Kak AC, Slaney M (2001) Principles of Computerized Tomographic Imaging. Philadelphia: Society for Industrial and Applied Mathematics.(an abridged republication of the work first published by IEEE Press, New York, 1988).
[51]	Golosio B, Simionovici A, Somogyi A, et al. (2003) Internal elemental microanalysis combining XRF, Compton and Transmission Tomography. J Appl Phys 94: 145. doi: 10.1063/1.1578176
[52]	Naghedolfeizi M, Chung J, Morris R, et al. (2003) X-ray fluorescence microtomography study of trace elements in a SiC nuclear fuel shell. J Nucl Mater 312: 146-155. doi: 10.1016/S0022-3115(02)01681-1
[53]	Lombi E, De Jonge MD, Donner E, et al. (2011) Fast X-ray fluorescence microtomography of hydrated biological samples. PLoS ONE 6: e20626. doi: 10.1371/journal.pone.0020626
[54]	Medjoubi K, Leclercq N, Langlois F, et al. (2013) Development of fast, simultaneous and multi-technique scanning hard X-ray microscopy at Synchrotron Soleil. J Synch Rad 20: 293-300. doi: 10.1107/S0909049512052119
[55]	Medjoubi K, Bonissent A, Leclercq N, et al. (2013) Simultaneous fast scanning XRF, dark field, phase-, and absorption contrast tomography. Proceedings of SPIE, 2013, 8851:art.n° 88510P
[56]	Vincze L, Vekemans B, Brenker FE (2004) Three-Dimensional Trace Element Analysis by Confocal X-ray Microfluorescence Imaging. Anal Chem 76: 6786. doi: 10.1021/ac049274l
[57]	Lamberti C, Agostini G, (2013) Characterization of Semiconductor Heterostructures and Nanostructures 2nd edn, ed C Lamberti, G Agostini (Amsterdam: Elsevier).
[58]	Calvin S (2013) XAFS for Everyone. Boca Raton FL: Taylor and Francis.
[59]	Schnohr CS, Ridgway MC (Eds.) (2015) X-Ray Absorption Spectroscopy of semiconductors, Series: Springer Series in Optical Sciences, Vol. 190 (Springer)
[60]	Martinez-Criado G, Somogyi A, Homs A, et al. (2005a) Micro-x-ray absorption near-edge structure imaging for detecting metallic Mn in GaN. Appl Phys Lett 87: 061913.
[61]	Seifert W, Vyvenko O, Arguirov T, et al. (2009) Synchrotron-based investigation of iron precipitation in multicrystalline silicon. Superlattice Microst 45: 168-176. doi: 10.1016/j.spmi.2008.11.025
[62]	Watts B, McNeil C (2010) Simultaneous Surface and Bulk Imaging of Polymer Blends with X-ray Spectromicroscopy. Macromolec Rapid Commun 31: 1706-1712. doi: 10.1002/marc.201000269
[63]	Watts B, McNeil C, Raabe J (2012) Imaging nanostructures in organic Semiconductor films with scanning transmission X-ray spectro-microscopy. Synthetic Met 161: 2516-2520. doi: 10.1016/j.synthmet.2011.09.016
[64]	d’Acapito F (2015) Group III-V and II-VI Nanowires in X-Ray Absorption Spectroscopy of Semiconductors. Springer Series in Optical Sciences 190: 269-286. doi: 10.1007/978-3-662-44362-0_13
[65]	Strachan JP, Medeiros-Ribeiro G, Yang JJ, et al. (2011) Spectromicroscopy of tantalum oxide memristors. Appl Phys Lett 98: 24-26.
[66]	Rau C, Somogyi A, Simionovici A (2003) Microimaging and tomography with chemical speciation. Nucl Instr Methods Phys Res B 200: 444-450. doi: 10.1016/S0168-583X(02)01737-8
[67]	Segura-Ruiz J, Martinez-Criado G, Chu MH, et al. (2011) Nano-X-ray Absorption Spectroscopy of Single Co-Implanted ZnO Nanowires. Nano Letters 11: 5322-5326. doi: 10.1021/nl202799e
[68]	Wang J, Chen-Wiegart YK, Wang J (2013) In situ chemical mapping of a lithium-ion battery using full-field hard X-ray spectroscopic imaging. Chem Com 49: 6480-6482. doi: 10.1039/c3cc42667j
[69]	Rosenberg RA, Shenoy GK, Sun XH, et al. (2006) Time-resolved x-ray-excited optical luminescence characterization of one-dimensional Si—CdSe heterostructures. Appl Phys Lett 89: 243102. doi: 10.1063/1.2402262
[70]	O’Malley SM, Revesz P, Kazimirov A, et al. (2011) Time-resolved x-ray excited optical luminescence in InGaN / GaN multiple quantum well structures. J Appl Phys 109: 124906. doi: 10.1063/1.3598137
[71]	Bianconi A, Jackson D (1978) Intrinsic luminescence excitation spectrum and extended x-ray absorption fine structure above the K edge in CaF₂. Phys Rev A 17: 2021-2024.
[72]	Goulon J, Tola P, Lemonnier M, et al. (1983) On a site-selective EXAFS experiment using optical emission, Chem. Phys. 78: 347-356.
[73]	Rogalev A, & Goulon J (2002) X-ray excited optical luminescence spectroscopies, Advanced Series in Physical Chemistry: Volume 12, Chemical Applications of Synchrotron Radiation, Edited by: Sham TK, 707-760. World Scientific.
[74]	Sham TK, Naftel SJ, Kim PG, et al. (2004) Electronic structure and optical properties of silicon nanowires : A study using x-ray excited optical luminescence and x-ray emission spectroscopy, Phys Rev B70:045313.
[75]	Hanke M, Dubslaff M, Schmidbauer M, et al. (2008) Scanning x-ray diffraction with 200 nm spatial resolution. Appl Phys Lett 92: 193109. doi: 10.1063/1.2929374
[76]	Diaz A, Mocuta C, Stangl J, et al. (2009) Spatially resolved strain within a single SiGe island investigated by X-ray scanning microdiffraction. Phys Stat Sol A 206: 1829-1832. doi: 10.1002/pssa.200881594
[77]	Mocuta C, Barbier A, Ramos AV, et al. (2007) Effect of optical lithography patterning on the crystalline structure of tunnel junctions. Appl Phys Lett 91: 241917. doi: 10.1063/1.2824858
[78]	Evans PG, Savage DE, Prance JR, et al. (2012) Nanoscale Distortions of Si Quantum Wells in Si/SiGe Quantum-Electronic Heterostructures. Adv Mater 24: 5217-5221. doi: 10.1002/adma.201201833
[79]	Chahine GA, Richard MI, Homs-Regojo RA, et al. (2014) Imaging of strain and lattice orientation by quick scanning X-ray microscopy combined with three dimensional reciprocal space mapping. J Appl Cryst 47: 762-769. doi: 10.1107/S1600576714004506
[80]	Goodman JW (2005) Introduction to Fourier Optics, Roberts and Company Publishers
[81]	Garcia-Sucerquia J, Xu W, Jericho SK, et al. (2006) Digital in-line holographic microscopy. Appl Opt 45: 836-850. doi: 10.1364/AO.45.000836
[82]	Leith EN, Upatniesks J (1962) Reconstructed Wavefronts and Communication Theory. J Opt Soc Am 52: 1123-1128. doi: 10.1364/JOSA.52.001123
[83]	Fuhse C, Ollinger C, Saldit T (2006) Waveguide-Based Off-Axis Holography with Hard X Rays. Phys Rev Lett 97: 254801. doi: 10.1103/PhysRevLett.97.254801
[84]	Eisebitt S, Luning J, Schlotter WF, et al. (2004) Lensless imaging of magnetic nanostructures by X-ray spectro-holography. Nature 432: 885-888. doi: 10.1038/nature03139
[85]	Stadler LM, Gutt C, Autenrieth T, et al. (2008) Hard X Ray Holographic Diffraction Imaging. Phys Rev Lett 100: 245503. doi: 10.1103/PhysRevLett.100.245503
[86]	Chamard V, Stangl J, Carbone D, et al. (2010) Three-Dimensional X-Ray Fourier Transform Holograhpy: The Bragg Case. Phys Rev Lett 104: 165501. doi: 10.1103/PhysRevLett.104.165501
[87]	Livet F (2007) Diffraction with a coherent X-ray beam: dynamics and imaging. Acta Crystallogr A 63: 87-107. doi: 10.1107/S010876730605570X
[88]	Miao J, Charalambous P, Kirz J, et al. (1999) Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens. Nature 400: 342-344. doi: 10.1038/22498
[89]	Miao J, Ishikawa T, Johnson B, et al. (2002) High Resolution 3D X-Ray Diffraction Microscopy. Phys Rev Lett 89: 088303. doi: 10.1103/PhysRevLett.89.088303
[90]	Takahashi T, Zettsu N, Nishino Y, et al. (2010) Three-Dimensional Electron Density Mapping of Shape-Controlled Nanoparticle by Focused Hard X-ray Diffraction Microscopy. Nano Lett 10: 1922-1926. doi: 10.1021/nl100891n
[91]	Diaz A, Mocuta C, Stangl J, et al. (2009B) Coherent diffraction imaging of a single epitaxial InAs nanowire using a focused x-ray beam. Phys Rev B 79: 125324.
[92]	Diaz A, Chamard V, Mocuta C, et al. (2010) Imaging the displacement field within epitaxial nanostructures by coherent diffraction: a feasibility study. New J Phys 12: 035006. doi: 10.1088/1367-2630/12/3/035006
[93]	Mastropietro F, Carbone D, Diaz A, et al. (2011) Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate. Opt Express 19: 19223-19232. doi: 10.1364/OE.19.019223
[94]	Pfeiffer M, Williams GJ, Vartanyants IA, et al. (2006) Three-dimensional mapping of a deformation field inside a nanocrystal. Nature 442: 63-66. doi: 10.1038/nature04867
[95]	Robinson IK, Vartanyants IA, Williams GJ, et al. (2001) Reconstruction of the Shapes of Gold Nanocrystals Using Coherent X-Ray Diffraction. Phys Rev Lett 87: 195505. doi: 10.1103/PhysRevLett.87.195505
[96]	Newton MC, Leake SJ, Harder R, et al. (2010) Three-dimensional imaging of strain in a single ZnO nanorod. Nature Mater 9: 120-124. doi: 10.1038/nmat2607
[97]	Beutier G, Verdier M, Parry G, et al. (2013). Strain inhomogeneity in copper islands probed by coherent X-ray diffraction. Thin Solid Films 530: 120-124. doi: 10.1016/j.tsf.2012.02.032
[98]	Minkevich AA, Gailhanou M, Micha JS, et al. (2007) Inversion of the Diffraction Pattern from an Inhomogeneously Strained Crystal using an Iterative Algorithm. Phys Rev B 76: 104106. doi: 10.1103/PhysRevB.76.104106
[99]	Minkevich AA, Baumbach T, Gailhanou M, et al. (2008) Applicability of an iterative inversion algorithm to the diffraction patterns from inhomogeneously strained crystals. Phys Rev B 78: 174110. doi: 10.1103/PhysRevB.78.174110
[100]	Minkevich AA, Fohtung E, Slobodskyy T, et al. (2011) Strain field in (Ga,Mn)As/GaAs periodic wires revealed by coherent X-ray diffraction. European Phys Lett 94: 66001. doi: 10.1209/0295-5075/94/66001
[101]	Williams GJ, Quiney HM, Dhal BB, et al. (2006) Fresnel Coherent Diffractive Imaging. Phys Rev Lett 97: 025506. doi: 10.1103/PhysRevLett.97.025506
[102]	Quiney HM, Peele AG, Cai Z, et al. (2006) Diffractive imaging of highly focused X-ray fields. Nature Phys 2: 101-104. doi: 10.1038/nphys218
[103]	Faulkner HLM, Rodenberg JM (2004) Movable Aperture Lensless Transmission Microscopy: A Novel Phase Retrieval Algorithm. Phys Rev Lett 93: 023903. doi: 10.1103/PhysRevLett.93.023903
[104]	Bunk O, Dierloff M, Kynde S, et al. (2007) Influence of the overlap parameter on the convergence of the ptychographical iterative engine. Ultramicroscopy 108: 481-487.
[105]	Maiden A, Rodenburg J (2009) An improved ptychographical phase retrieval algorithm for diffractive imaging. Ultramicroscopy 109: 1256-1262. doi: 10.1016/j.ultramic.2009.05.012
[106]	Guizar-Sicairos M, Fineup J (2008) Phase retrieval with transverse translation diversity: a nonlinear optimization approach. Opt Express 16: 7264-7278. doi: 10.1364/OE.16.007264
[107]	Dierolf M, Menzel A, Thibault P, et al. (2010) Ptychographic X-ray computed tomography at the nanoscale. Nature 467: 436-439. doi: 10.1038/nature09419
[108]	Godard P, Carbone G, Allain M, et al. (2011) Three-dimensional high-resolution quantitative microscopy of extended crystals. Nature Commun 2: 568. doi: 10.1038/ncomms1569
[109]	Godard P, Allain M, Chamard V, et al. (2011B) Imaging of highly inhomogeneous strain field in nanocrystals using x-ray Bragg ptychography: A numerical study. Phys Rev B 84: 144109.
[110]	Korsunsky A, Hofmann F, Abbey B, et al. (2012) Analysis of the internal structure and lattice (mis) orientation in individual grains of deformed CP nickel polycrystals by synchrotron X-ray micro-diffraction and microscopy. Int J Fatigue 42: 1-13. doi: 10.1016/j.ijfatigue.2011.03.003
[111]	Georgiadis M, Guizar-sicairos M, Zwahlen A, et al. (2015).3D scanning SAXS: A novel method for the assessment of bone ultrastructure orientation. Bone 71: 42-52. doi: 10.1016/j.bone.2014.10.002
[112]	Snigirev A, Snigireva I, Kohn V, et al. (1995) On the possibilities of x-ray phase contrast microimaging by coherent high‐energy synchrotron radiation. Rev Sci Instrum 66: 5486. doi: 10.1063/1.1146073
[113]	Cloetens P, Pateyron-Salomé M, Buffière J, et al. (1997) Observation of microstructure and damage in materials by phase sensitive radiography and tomography. J Appl Phys 81: 5.
[114]	Pfeiffer M, Bech M, Bunk O, et al. (2008) Hard-X-ray dark-field imaging using a grating interferometer. Nature Mater 7: 134-137. doi: 10.1038/nmat2096
[115]	Weitkamp T, Diaz A, David C, et al. (2005) X-ray phase imaging with a grating interferometer. Opt Express 13: 6296. doi: 10.1364/OPEX.13.006296
[116]	David C, Nohammer B, Solak H, et al. (2002) Differential x-ray phase contrast imaging using a shearing interferometer. Appl Phys Lett 81: 3287. doi: 10.1063/1.1516611
[117]	Egan CK, Wilson MD, Veale MC, et al. (2014) Material specific X-ray imaging using an energy-dispersive pixel detector. Nucl Instrum Meth Phys Res B 324: 25-28. doi: 10.1016/j.nimb.2013.11.021
[118]	Ice GE, Specht ED (2012) Microbeam, timing and signal-resolved studies of nuclear materials with synchrotron X-ray sources. J Nucl Mat 425: 233-237. doi: 10.1016/j.jnucmat.2011.10.038
[119]	Singer A, Ulvestad A, Cho H, et al. (2014) Nonequilibrium Structural Dynamics of Nanoparticles in LiNi1/2Mn3/2O4 Cathode under Operando Conditions. Nano Lett 14: 5295-5300. doi: 10.1021/nl502332b
[120]	Wang L, Ding Y, Patel U, et al. (2011) Studying single nanocrystals under high pressure using an x-ray nanoprobe. Rev Sci Inst 82: 43903. doi: 10.1063/1.3584881
[121]	Xu F, Helfen L, Suhonen H, et al. (2012) Correlative Nanoscale 3D Imaging of Structure and Composition in Extended Objects. PLOS One 7: e50124. doi: 10.1371/journal.pone.0050124
[122]	McHugo S, Thompson C, Périchaud I, et al. (1998) Direct correlation of transition metal impurities and minority carrier recombination in multicrystalline silicon. Appl Phys Lett 72: 3482. doi: 10.1063/1.121673
[123]	Vyvenko OF, Buonassisi T, Istratov AA, et al. (2002) X-ray beam induced current—A synchrotron radiation based technique for the in situ analysis of recombination properties and chemical nature of metal clusters in silicon. J Appl Phys 91: 3614-3617. doi: 10.1063/1.1450026
[124]	Istratov AA, Buonassisi T, McDonald RJ, et al. (2003) Metal content of multicrystalline silicon for solar cells and its impact on minority carrier diffusion length. J Appl Phys 94: 6552. doi: 10.1063/1.1618912
[125]	Buonassisi T, Istratov AA, Huer M, et al. (2005a) Synchrotron-based investigations of the nature and impact of iron contamination in multicrystalline silicon solar cells. J Appl Phys 97: 074901.
[126]	Buonassisi T, Istratov AA, Pickett MD, et al. (2006) Chemical natures and distributions of metal impurities in multicrystalline silicon materials. Progress in Photovoltaics: Res App 14: 512-531.
[127]	Trushin M, Seifert W, Vyvenko O, et al. (2010) XBIC/μ-XRF/μ-XAS analysis of metals precipitation in block-cast solar silicon. Nucl Inst Methods Phys Res B 268: 254-258. doi: 10.1016/j.nimb.2009.09.057
[128]	Gundel P, Schubert MC, Heinz FD, et al. (2010) Impact of stress on the recombination at metal precipitates in silicon. J Appl Phys 108: 103707. doi: 10.1063/1.3511749
[129]	Fenning DP, Hofstetter J, Bertoni MI, et al. (2011) Iron distribution in silicon after solar cell processing: Synchrotron analysis and predictive modeling. Appl Phys Lett 98: 162103. doi: 10.1063/1.3575583
[130]	Fenning DP, Hofstetter J, Bertoni MI, et al. (2013). Precipitated iron: A limit on gettering efficacy in multicrystalline silicon Precip. J Appl Phys 113: 044521.
[131]	Zuschlag M, Schwab M, Merhof D, Hahn G (2014) Transition metal precipitates in mc Si: a new detection method using 3D-FIB. Solid State Phenom 205-206: 136-141.
[132]	Dietl T (2010) A ten-year perspective on dilute magnetic semiconductors and oxides. Nat Mater 9: 965-974. doi: 10.1038/nmat2898
[133]	Martinez-Criado G, Somogyi A, Ramos S, et al. (2005) Mn-rich clusters in GaN: Hexagonal or cubic symmetry? Appl Phys Lett 86: 131927. doi: 10.1063/1.1886908
[134]	Martínez-Criado G, Somogyi A, Hermann M, et al. (2004) Direct observation of Mn clusters in GaN by X-ray scanning microscopy. Jap J Appl Phys Part 2: Letter 43: 695-697. doi: 10.1143/JJAP.43.695
[135]	Sancho-Juan O, Cantarero A, Martínez-Criado G, et al. (2006) X-ray absorption near edge spectroscopy at the Mn K-edge in highly homogeneous GaMnN diluted magnetic semiconductors. Physica Status Solidi (B) Basic Res 243: 1692-1695. doi: 10.1002/pssb.200565413
[136]	Sancho-Juan O, Cantarero A, Garro N, et al. (2009) X-ray absorption near-edge structure of GaN with high Mn concentration grown on SiC. J Phys Cond Mat 21: 295801. doi: 10.1088/0953-8984/21/29/295801
[137]	Farvid SS, Hegde M, Hosein ID, et al. (2011) Electronic structure and magnetism of Mn dopants in GaN nanowires : Ensemble vs single nanowire measurements. Appl Phys Lett 99: 222504. doi: 10.1063/1.3664119
[138]	Segura-Ruiz J, Martinez-Criado G, Denker C, et al. (2014) Phase Separation in Single InxGa1-xN Nanowires Revealed through a Hard X ray Synchrotron Nanoprobe. Nano Lett 14: 1300-1305. doi: 10.1021/nl4042752
[139]	Egerton RF, Li P, Malac M (2004) Radiation damage in the TEM and SEM, 35: 399-409.
[140]	Hitchcock AP, Dynes JJ, Johansson G, et al. (2008a) Comparison of NEXAFS microscopy and TEM-EELS for Studies of Soft Matter. Micron 39:741-748.
[141]	Harris WM, Lombardo JJ, Nelson GJ, et al. (2014) Three-dimensional microstructural imaging of sulfur poisoning-induced degradation in a Ni-YSZ anode of solid oxide fuel cells. Scientific Reports 4: 5246.
[142]	Martinez-Criado G, Alen B, Homs A, et al. (2006) Scanning x-ray excited optical luminescence microscopy in GaN. Appl Phys Lett 89: 221913. doi: 10.1063/1.2399363
[143]	Martínez-Criado G, Homs A, Alén B, et al. (2012) Probing quantum confinement within single core- multishell nanowires. Nano Lett 12: 5829-5834. doi: 10.1021/nl303178u
[144]	Paterson D, Jonge MD De, Howard DL, et al. (2011). The X-ray fluorescence microscopy beamline at the Australian synchrotron. AIP Conf Proc 1365:219-222.
[145]	Huang X, Lauer K, Clark JN, et al. (2015). Fly-scan ptychography. Scientific Reports 5:9074.
[146]	Jonge MD De, Ryan G, Jacobsen CJ (2014) X-ray nanoprobes and diffraction-limited storage rings : opportunities and challenges of fluorescence tomography of biological specimens. J Synch Rad 21:1031-1047. doi: 10.1107/S160057751401621X
[147]	Guillamet R, Lagay N, Mocuta C, et al. (2013) Micro-characterization and three imensional modeling of very large waveguide arrays by selective area growth for photonic integrated circuits. J Cryst Growth 370: 128-132. doi: 10.1016/j.jcrysgro.2012.09.053
[148]	Decobert J, Guillamet R, Mocuta C, et al. (2013) Structural characterization of selectively grown multilayers with new high angular resolution and sub-millimeter spot-size x-ray diffractometer. J Cryst Growth 370: 154-156. doi: 10.1016/j.jcrysgro.2012.06.011
[149]	Bussone G, Schäfer-Eberwein H, Dimakis E, et al. (2015) Correlation of Electrical and Structural Properties of Single As-Grown GaAs Nanowires on Si (111) Substrates. Nano Lett 15: 981. doi: 10.1021/nl5037879
[150]	Beutier G, Verdier M, De Boissieu M, et al. (2013b) Combined coherent x-ray micro-diffraction and local mechanical loading on copper nanocrystals. J Phys Conf Series 425: 132003.
[151]	Mondiali V, Bollani M, Cecchi S, et al. (2014A) Dislocation engineering in SiGe on periodic and aperiodic Si(001) templates studied by fast scanning X-ray nanodiffraction. Appl Phys Lett 104: 021918.
[152]	Mondiali V, Bollani M, Chrastina D, et al. (2014B) Strain release management in SiGe/Si films by substrate patterning. Appl Phys Lett 105: 242103.
[153]	Als-Nielsen J, McMorrow D (2011) Elements of Modern X-ray Physics. (2nd Edition), Wiley.
[154]	Riekel C, Davies JD (2005) Applications of synchrotron radiation micro-focus techniques to the study of polymer and biopolymer fibers. Curr Opin Colloid In 9: 396-403. doi: 10.1016/j.cocis.2004.10.004
[155]	Larson BC, Yang W, Ice GE, et al. (2002) Three-dimensional X-ray structural microscopy with submicrometre resolution. Nature 415: 887-890. doi: 10.1038/415887a
[156]	Budai JD, Yang WG, Tamura N, et al. (2003) X-ray microdiffraction study of growth modes and crystallographic tilts in oxide films on metal substrates. Nature Materials 2: 487-492. doi: 10.1038/nmat916
[157]	Schmidbauer M (2004) X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures. Springer Tracts in Modern Physics 199.
[158]	Hrauda N, Zhang JJ, Groiss H, et al. (2013) Strain relief and shape oscillations in site-controlled coherent SiGe islands. Nanotechnology 24: 335707. doi: 10.1088/0957-4484/24/33/335707
[159]	Barbier A, Mocuta C, Belkhou R (2012) Selected Synchrotron Radiation Techniques, chapter in Enciclopedia of Nanotechnology. ed. B. Bhushan, 2322-2344. Springer.
[160]	Holy V, Mundboth K, Mocuta C, et al. (2008) Structural characterization of self-assembled semiconductor islands by three-dimensional X-ray diffraction mapping in reciprocal space. Thin Solid Films 516: 8022-8028. doi: 10.1016/j.tsf.2008.04.009
[161]	Mocuta C, Barbier A, Ramos AV, et al. (2009) Crystalline structure of oxide-based epitaxial tunnel junctions. Eur Phys J Special Topics 167: 53-58. doi: 10.1140/epjst/e2009-00936-5
[162]	Murray CE, Noyan IC, Mooney PM, et al. (2003) Mapping of strain fields about thin film structures using x-ray microdiffraction. Appl Phys Lett 83: 4163. doi: 10.1063/1.1628399
[163]	Murray CE, Saenger KL, Kalenci O, et al. (2008) Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures. J Appl Phys 104: 013530. doi: 10.1063/1.2952044
[164]	Murray CE, Yan HF, Noyan IC, et al. (2005) High-resolution strain mapping in heteroepitaxial thin-film features. J Appl Phys 98: 013504. doi: 10.1063/1.1938277
[165]	Murray CE, Ying A, Polvino SM, et al. (2011) Nanoscale silicon-on-insulator deformation induced by stressed liner structures. J Appl Phys 109: 083543. doi: 10.1063/1.3579421
[166]	Vartaniants IA, Zozulya AV, Mundboth K, et al. (2008) Crystal truncation planes revealed by three-dimensional reconstruction of reciprocal space. Phys Rev B 77: 115317. doi: 10.1103/PhysRevB.77.115317
[167]	Yefanov OM, Zozulya AV, Vartaniants IA, et al. (2009) Coherent diffraction tomography of nanoislands from grazing-incidence small-angle x-ray scattering. Appl Phys Lett 94: 123104. doi: 10.1063/1.3103246
[168]	Zozulya AV, Yefanov OM, Vartaniants IA, et al. (2009) Imaging of nanoislands in coherent grazing-incidence small-angle x-ray scattering experiments. Phys Rev B 78: 121304R.
[169]	Nanver LK, Jovanovis V, Biasotto C, et al. (2011) Integration of MOSFETs with SiGe dots as stressor material. Solid State Electronics 60: 75-83. doi: 10.1016/j.sse.2011.01.038
[170]	Rodrigues MS, Cornelius TW, Scheler T, et al. (2009) In situ observation of the elastic deformation of a single epitaxial SiGe crystal by combining atomic force microscopy and micro x-ray diffraction. J Appl Phys 106: 103525. doi: 10.1063/1.3262614
[171]	Cornelius TW, Davydok A, Jacques VLR, et al. (2012) In situ three-dimensional reciprocal-space mapping during mechanical deformation. J Synch Rad 19: 688-694. doi: 10.1107/S0909049512023758
[172]	Cornelius TW, Mastropietro F, Thomas O, et al. (2013) In situ nanofocused X-ray diffraction combined with scanning probe microscopy, chapter in X-ray diffraction: Structure, Principles and Applications, ed. Shih K, 223-259, Nova Science Publisher.
[173]	Kang HC, Yan H, Chu YS, et al. (2013). Oxidation of PtNi nanoparticles studied by a scanning X-ray fluorescence microscope with multi-layer Laue lenses. Nanoscale 5:7184.
[174]	Chu YS (2010) Preliminary Design Report for the Hard X-ray (HXN) Nanoprobe Beamline. National Synchrotron Light Source II, Brookhaven National Laboratory, LT-C-XFD-HXN-PDR-001.
[175]	Nazaretski E, Lauer K, Yan H, et al. (2015). Pushing the limits: an instrument for hard X-ray imaging below 20 nm. J Synch Rad 22:336-341. doi: 10.1107/S1600577514025715
[176]	Vogt S, Lanzirotti A (2013) Trends in X-ray Fluorescence Microscopy. Synchrotron Radiation News 26: 32-38.
[177]	Deng J, Vine DJ, Chen S, et al. (2015) Simultaneous cryo X-ray ptychographic and fluorescence microscopy of green algae. Proc Nat Acad Sci 112: 2314-2319. doi: 10.1073/pnas.1413003112
[178]	Que EL, Bleher R, Duncan FE, et al. (2015) Quantitative mapping of zinc fluxes in the mammalian egg reveals the origin of fertilization-induced zinc sparks. Nature Chem 7: 130-139.
[179]	Davies R, Burghammer M, Riekel C (2009) A combined microRaman and microdiffraction set-up at the European Synchrotron Radiation Facility ID13 beamline. J Synch Rad 16: 22-29. doi: 10.1107/S0909049508034663
[180]	Bernal S, Provis JL, Rose V, et al. (2013). High-resolution X-ray diffraction and fluorescence microscopy characterization of alkali-activated slag-metakaolin binders. J Am Ceramic Soc 96: 1951-1957. doi: 10.1111/jace.12247
[181]	Andrews JC, Weckhuysen BM (2013) Hard X-ray Spectroscopic Nano-Imaging of Hierarchical Functional Materials at Work. Chem Phys Chem 14: 3655.
[182]	Barrea RA, Gore D, Kujala N (2010) Fast-scanning high-flux microprobe for biological X-ray fluorescence microscopy and microXAS. J Synch Rad 17: 522-529. doi: 10.1107/S0909049510016869
[183]	Mocuta C, Richard MI, Fouet J, et al. (2013B) Fast pole figure acquisition using area detectors at DiffAbs beamline - Synchrotron SOLEIL. J Appl Cryst 46: 1842-4853.
[184]	Eriksson M, van der Veen JF, guest editors (2014) Special issue on Diffraction-Limited Storage Rings and New Science Opportunities. J Synch Rad 21: Part 5.
[185]	Hettel R (2014) Diffraction-limited storage rings DLSR design and plans : an international overview diffraction-limited storage rings. J Synch Rad 21:843-855. doi: 10.1107/S1600577514011515
[186]	Mimura H, Handa S, Kimura T, et al. (2010) Breaking the 10nm barrier in hard-X-ray focusing. Nature Physics 6:122-125.
[187]	Yamauchi K, Mimura H, Kimura T, et al. (2011) Single-nanometer focusing of hard x-rays by Kirkpatrick - Baez mirrors. J Phys: Condensed Matter 23:394206. doi: 10.1088/0953-8984/23/39/394206
[188]	Yan H, Conley R, Bouet N, et al. (2014) Hard x-ray nanofocusing by multilayer Laue lelenses. J Phys D: Appl Phys 47: 263001. doi: 10.1088/0022-3727/47/26/263001
[189]	Döring F, Robisch L, Eberl C, et al. (2013) Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate. Opt Express 21: 19311-19323. doi: 10.1364/OE.21.019311
[190]	Mohacsi I, Vartiainen I, Guizar-Sicairos M, et al. (2015) High resolution double-sided diffractive optics for hard X-ray microscopy. Opt Express 23:776-786. doi: 10.1364/OE.23.000776
[191]	Schroer CG, Falkenberg G (2014) Hard X-ray nanofocusing at low-emittance synchrotron radiation sources. J Sync Rad 21:996-1005. doi: 10.1107/S1600577514016269
[192]	Thibault P, Guizar-Sicairos M, Menzel A (2014) Coherent imaging at the diffraction limit. J Synch Rad 21: 1011-1018. doi: 10.1107/S1600577514015343
[193]	Schlichting I, White WE, Yabashi M, guest editors (2015) Special issue on X-ray Free-Electron Lasers, Guest Editors: J Synch Rad 22:Part 3.
[194]	Solé VA, Papillon E, Cotte M, et al. (25007) A multiplatform code for the analysis of energy-dispersive X-ray fluorescence spectra. Spectrochim Acta B 62: 63-68.
[195]	Ashiotis G, Deschildre A, Nawaz Z, et al. (2015) The fast azimuthal integration Python library: pyFAI. J Appl Cryst 48: 510-519. doi: 10.1107/S1600576715004306

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